Date Published:Jun. 17. 2022

No. 3: Process gas and wafer cleaning agent

Process gases (a special kind of gas) and cleaning agents (for removing impurities) are often used in semiconductor manufacturing processes.

Our silicon carbide (SiC) test data is freely available, with regard to these highly corrosive chemical liquids.


What are process gases?

Inert gases and special gases (collectively referred to as "process gases") are often used in semiconductor manufacturing processes including the film formation and etching processes.
Some gases can even corrode stainless steel materials such as SUS304.

<Examples of process gases>
Monosilane Silicon tetrachloride Silicon tetrafluoride CFC-116 Phosphorus pentafluoride
Arsine Disilane CFC-218 CFC-32 Tungsten hexafluoride
Phosphine Boron trifluoride Hydrogen bromide Nitrous oxide CFC-22
Diborane Boron trichloride Chlorine Trichlorosilane CFC-123
Germane Hydrogen chloride Chlorine trifluoride Titanium tetrachloride  
Dichlorosilane Ammonia CFC-14 Hydrogen fluoride  
Hydrogen selenide Nitrogen trifluoride CFC-23 Phosphorus trifluoride  

What are wafer cleaning agents?

There are also processes where special cleaning agents are used to clean dirt and minute impurities from wafers.
Cleaning agents such as SPM (sulfuric acid hydrogen peroxide water solution) and FPM (hydrofluoric acid hydrogen peroxide water solution) may even dissolve stainless steel and other metals.

<Examples of cleaning agents>
SC-1 (ammonia hydrogen peroxide water solution)
SC-2 (hydrochloric acid hydrogen peroxide water solution)
SPM (sulfuric acid hydrogen peroxide water solution)
FPM (hydrofluoric acid hydrogen peroxide water solution)
BHF (buffered hydrofluoric acid solution)

NBK offers chemical resistant screws with excellent corrosion resistance.

They can be used even in environments where they may be exposed to process gas or wafer cleaning agents.
See here for our full lineup of chemical resistant screws
*Chemical resistance changes with usage conditions. Always carry out tests under performance conditions similar to actual conditions in advance.

Chemical Resistant Screws

Metallic
 
Material Tantalum MAT21 HastelloyC-22 HastelloyC-276 Inconel Nickel
Part Name Hex Socket Head Cap Screws (Tantalum) Hex Socket Head Cap Screws (MAT21) Socket Head Cap Screw -Hastelloy C-22 equiv. Socket Head Cap Screw -Hastelloy C-276 equiv. Socket Head Cap Screw -Inconel equiv. Hex Socket Head Cap Screws - Nickel
Part Number SNSTA SNSMT SNSH-C22 SNSH-C276 SNSI SNSN
  Click here for the lineup Click here for the lineup

 
Material SUS316L SUS310S Titanium
Part Name Socket Head Cap Screws - SUS316L Socket Head Cap Screws - SUS310S Hex Socket Head Cap Screws - High Intensity Titanium Alloy
Part Number SNSL SNSJ SNSTG
  Click here for the lineup Click here for the lineup

Ceramic/resin
 
Material Silicon Carbide (SiC) Al2O3(99.5% Alumina) PEEK GF30 PEEK PTFE PFA (Perfluoroalkoxy Alkane)
Part Name Slotted Pan Head Screws (Silicon Carbide) Ceramic Hex Socket Head Cap Bolts Plastic Screws - Hex Socket Head Cap Screws - PEEK GF30 Plastic Screws - Cross Recessed Pan Head Machine Screws - PEEK Plastic Screw - Hex Head Screws - PTFE Plastic Screws - Hex Head Screws - PFA
Part Number SICX-SX SCX-C SPEG-C SPE-P SPT-H SPFA-H
  Click here for the lineup Click here for the lineup

Our silicon carbide (SiC) chemical resistance test data is freely available.


 
Material Al2O3(99.5% Alumina) PTFE(Polytetrafluoroethylene) SUSXM7 (Equivalent to SUS304)
Part Name Cover Caps Cover Caps - PTFE Socket Head Cap Screws for Cover Caps
Part Number SCAP-CE SCAP-PT SNCPS
  Click here for the lineup
*Use in combination with cover caps (SCAP-CE or SCAP-PT) and socket head cap screws for cover caps (SNCPS).

SUSXM7(Equivalent to SUS304)PTFE Coating (Head Only)
Hex Head Screws - PTFE Coating for Head
SNHS-HTF
Click here for the lineup

See here for special product problem solution examples using chemical resistant screws

Problem Solution Examples by Semiconductor Manufacturing Process

Problem solution examples are introduced by semiconductor manufacturing process.
Pre-process here
Post-process here

Product Introduction Glossary Heat resistance/corrosion resistance Cleanroom/vacuum/non-magnetic Semiconductor Manufacturing Equipment The Semiconductor Industry and NBK Special Screws