Wafer cleaning machinery

Cleaning process

Component corrosion prevention is required

Screws with superior chemical resistance can be selected to withstand the environment within equipment where chemicals are applied.

Characteristics required for special screws：Chemical resistance

＊1：Hastelloy is a registered trademark of Haynes International, Inc.
＊2：VESPEL is a registered trademark of DuPont.

See here for further details about chemical-resistant screws▶

Oxidation/diffusion equipment

Heat treatment/oxidation/diffusion process

Resistance to high temperatures and chemicals is required

For environments where various gases are used at high temperatures, select screws with excellent heat resistance and chemical resistance.

Characteristics required for special screws：Heat resistance Chemical resistance

＊1：Inconel is a registered trademark of Special Metals Corporation.
＊2：Hastelloy is a registered trademark of Haynes International, Inc.
＊3：MAT and MAT21 are registered trademarks of Proterial, Ltd.

Coater/developer

Film formation process

Improved production capacity is required

Use a high-rigidity coupling for the highspeed rotation required for photoresist film formation on the wafer.

Characteristics required for couplings：High rigidity

Component corrosion prevention is required

Screws with superior chemical resistance can be selected to withstand the environment within equipment where chemicals are applied.

Characteristics required for special screws：Chemical resistance

＊1：Inconel is a registered trademark of Special Metals Corporation.

Semiconductor lithography equipment

Photolithography process

Improved equipment accuracy is required

Even the small screws used at joints enable exposure accuracy to be improved by suppressing the influence of reflection.

Characteristics required for special screws：Anti-reflection

Anti-reflection screws See here for further details▶

Etching equipment

Etching process

Resistance to high temperatures and chemicals is required

For environments where various gases and solvents are used at high temperatures, select screws with excellent heat resistance and chemical resistance.

Characteristics required for special screws：Heat resistance Chemical resistance

＊1：Hastelloy is a registered trademark of Haynes International, Inc.

Heat-resistant screws▶

Chemical-resistant screws▶

Motor damage must be prevented

Components with excellent insulating properties are required as a countermeasure to prevent energization from vacuum variable capacitors.

Characteristics required for couplings：Insulating properties

Ion implantation equipment

Ion implantation process

Improved degree of vacuum is required

The degree of vacuum can be further improved by removing air trapped within the screw hole.

Characteristics required for special screws：Vacuum

A screw that doesn't gall at high temperatures is required

We have screws that prevent galling due to heat cycling in environments of 1000°C or higher.

Characteristics required for special screws：Heat resistance

Improved equipment accuracy is required

Non-magnetic components should be used for the fasteners to prevent ions from deflection due to the magnetic properties of the part.

Characteristics required for special screws：Non-Magnetic

Film deposition equipment/ sputtering equipment

Film formation process

Motor damage must be prevented

Components with excellent insulating properties are required as a countermeasure to prevent energization from vacuum variable capacitors.

Characteristics required for couplings：Insulating properties

Resistance to high temperatures and chemicals is required

For environments where various gases are used at high temperatures, select screws with excellent heat resistance and chemical resistance.

Characteristics required for special screws：Heat resistance Chemical resistance

＊1：Hastelloy is a registered trademark of Haynes International, Inc.
＊2：Inconel is a registered trademark of Special Metals Corporation.

Heat-resistant screws▶

Chemical-resistant screws▶

Improved degree of vacuum is required

The degree of vacuum can be further improved by removing air trapped within the screw hole.

Characteristics required for special screws：Vacuum

Physical inspection equipment

Inspection/evaluation process

Improved degree of vacuum is required

The degree of vacuum can be further improved by removing air trapped within the screw hole.

Characteristics required for special screws：Vacuum

Increased inspection accuracy is required

Characteristics required for special screws：Non-magnetic

See here for further details about non-magnetic screws▶

Countermeasures for screw loosening and contamination are required

A lineup of non-magnetic hex socket head cap screws is available.
Compared to slotted sockets and cross-recessed sockets, the hex socket head cap shape is less likely to undergo cam-out, making it effective in preventing contamination.
The high strength of Grade 5 Titanium also enables tightening at higher torques, making it effective as a loosening countermeasure as well.
The lineup of Grade 5 Titanium and phosphor bronze hex socket head cap screws runs from M2 up.

Image
Part Name	Hex Socket Head Cap Screws - High Intensity Titanium Alloy	Hex Socket Head Cap Screws - Phosphor Bronze
Part Number	SNSTG	SNSP
Material	Grade 5 Titanium	C5191(Phosphor Bronze)
Thread Size	M2～M10	M2～M8

Miniature Screws▶

Electrical inspection equipment

Inspection/evaluation process

Improved equipment accuracy is required

Realizes even greater servomotor gain, leading to reduced stabilization time.

Characteristics required for drive components：High gain support

More compact equipment is required

We have small diameter screws of M2.6 and less, including S0.6 up and M1 up.

Characteristics required for special screws：Space-saving