Date Published:Jul. 06. 2022
No. 4: Electron beam and ion
Equipment using electron beams and ions
・Electron beam lithography equipment
・Electron beam exposure equipment
・Scanning electron microscopes
・Ion implantation equipment
These equipment types use large quantities of low-magnetism parts in order to avoid affecting the electron beams or ions.
As well, because electron beams are used in vacuum environments in order not to collide with airborne molecules, many types of equipment include vacuum chambers.
For vacuum environments, see here
NBK offers non-magnetic products
|Material||Tantalum||C5191（Phosphor Bronze）||64 Titanium||Pure Titanium||Titanium||SUS316L|
|Part Name||Hex Socket Head Cap Screws
|Hex Socket Head Cap Screws - Phosphor Bronze||Hex Socket Head Cap Screws - High Intensity Titanium Alloy||Hex Socket Head Cap Screws - Titanium||Cross Recessed Flat Head Machine Screws - High Intensity Titanium Alloy||Socket Head Cap Screw with Special Low Profile - Stainless Steel|
|Click here for the lineup||Click here for the lineup||Click here for the lineup||
Click here for the lineup
Tools for locations where magnetization is to be avoided are also available.
|Material||64 Titanium||CFRTP（Carbon Fiber Reinforced Thermoplastics resin）|
|Part Name||Titanium Hexagon Key||CFRTP Adjustable Wrench|
|Click here for the lineup|
Problem Solution Examples by Semiconductor Manufacturing ProcessProblem solution examples are introduced by semiconductor manufacturing process.
"The Semiconductor Industry and NBK" back numbersList here
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No. 2: Vacuum environments
Vacuum technology is often used in semiconductor manufacturing equipment. A vacuum is not required for all equipment. A vacuum would mainly be required for equipment that uses plasma or an electron beam. In Part 2, we introduce some NBK products that are ideal for use in these vacuum environments!
No. 6: Thermal Cycling
Here we discuss thermal cycling, which is often an issue in semiconductor manufacturing equipment.
No. 5: Solving common problems inside equipment
In Part 5, we will introduce NBK products used in semiconductor manufacturing equipment interiors, as well as various examples of the resolution of issues such as vacuum, heat-resistance, isolation and so on.